Siwin-TEOS electronic grade
Siwin
Siwin-TEOS electronic grade
78-10-4
| Quantity: | |
|---|---|
Silane Siwin-TEOS
electronic garde
Vinyltriisopropenoxysilane
Formulation | Si（C2H5O）4 |
Molecule weight | 208.33 |
Cas no. | 78-10-4 |
Physical properties | Colorless transparent liquid Melting point:－77℃， Boiling point: 169℃， Density: 0.93g/mL。 Stable in water；slight soluble in water and hydrolyze in pure water, hydrolyze more quickly in acids and bases。 |
Applications | It is mainly used in the chemical vapor deposition (CVD) process during wafer manufacturing, and reacts with O2 / O3 / N2O to form silicon dioxide films. It is an important electronic chemical required for the manufacture of semiconductors, discrete devices, and micro-electromechanical systems (MEMS) |
Typical Physical Properties
Items | Standard data | Itms | Standard data | ||
Purity（ | 99.999999 (8N) | 锰（Mn）max | 0.1 ppb | ||
铝（Al）max | 0.2ppb | 钼（Mo）max | 0.1 ppb | ||
银（Ag）max | 0.1 ppb | 钠（Na）max | 0.5 ppb | ||
砷（As）max | 0.4 ppb | 铌（Nb）max | 0.1 ppb | ||
金（Au）max | 0.1 ppb | 镍（Ni）max | 0.2 ppb | ||
硼（B ）max | 0.5 ppb | 铅（Pb）max | 0.1 ppb | ||
钡（Ba）max | 0.1 ppb | 锑（Sb）max | 0.1 ppb | ||
铍（Be）max | 0.1 ppb | 锡（Sn）max | 0.2 ppb | ||
铋（Bi）max | 0.1 ppb | 锶（Sr）max | 0.1 ppb | ||
钙（Ca）max | 0.5 ppb | 钍（Th）max | 0.1 ppb | ||
镉（Cd）max | 0.1 ppb | 钨（W ）max | 0.1 ppb | ||
钛（Ti）max | 0.1 ppb | 锌（Zn）max | 0.2 ppb | ||
铀（U ）max | 0.1 ppb | Cl- max | 0.5ppm | ||
钒（V ）max | 0.1 ppb | Water max | 5ppm | ||
钴（Co）max | 0.4 ppb | Ethanol max | 3ppm | ||
铜（Cu）max | 0.2 ppb | particle≥0.1µm max | 50p/ml | ||
铬（Cr）max | 0.2 ppb | particle≥0.2µm max | 30p/ml | ||
铁（Fe）max | 0.2 ppb | particle≥0.3µm max | 20p/ml | ||
锆（Zr）max | 0.1 ppb | particle≥0.5µm max | 10p/ml | ||
镓（Ga）max | 0.4 ppb | particle≥1.0µm max | 3p/ml | ||
汞（Hg）max | 0.3 ppb | Chromacity max | 10APHA | ||
钾（ K）max | 0.2 ppb | Main content（ | 99.99 | ||
锂（Li）max | 0.1 ppb | Appearance | Colorless transparent liquid | ||
镁（Mg）max | 0.5 ppb | Shelf life | 24 months | ||
