electronic grade Vinyltriisopropenoxysilane Alcohol Type crosslinking agents CAS 78-10-4 for and micro-electromechanical systems (MEMS)

Molecule weight

208.33

Cas no.

78-10-4

Physical properties

Colorless transparent liquid

Melting point:－77℃，

Boiling point: 169℃，

Density: 0.93g/mL。

Stable in water；slight soluble in water and hydrolyze in pure water, hydrolyze more quickly in acids and bases。

Applications

It is mainly used in the chemical vapor deposition (CVD) process during wafer manufacturing, and reacts with O2 / O3 / N2O to form silicon dioxide films. It is an important electronic chemical required for the manufacture of semiconductors, discrete devices, and micro-electromechanical systems (MEMS)

Purity（）min

99.999999 (8N)

锰（Mn）max

0.1 ppb

铝（Al）max

0.2ppb

钼（Mo）max

0.1 ppb

银（Ag）max

0.1 ppb

钠（Na）max

0.5 ppb

砷（As）max

0.4 ppb

铌（Nb）max

0.1 ppb

金（Au）max

0.1 ppb

镍（Ni）max

0.2 ppb

硼（B ）max

0.5 ppb

铅（Pb）max

0.1 ppb

钡（Ba）max

0.1 ppb

锑（Sb）max

0.1 ppb

铍（Be）max

0.1 ppb

锡（Sn）max

0.2 ppb

铋（Bi）max

0.1 ppb

锶（Sr）max

0.1 ppb

钙（Ca）max

0.5 ppb

钍（Th）max

0.1 ppb

镉（Cd）max

0.1 ppb

钨（W ）max

0.1 ppb

钛（Ti）max

0.1 ppb

锌（Zn）max

0.2 ppb

铀（U ）max

0.1 ppb

Cl- max

0.5ppm

钒（V ）max

0.1 ppb

Water max

5ppm

钴（Co）max

0.4 ppb

Ethanol max

3ppm

铜（Cu）max

0.2 ppb

particle≥0.1µm max

50p/ml

铬（Cr）max

0.2 ppb

particle≥0.2µm max

30p/ml

铁（Fe）max

0.2 ppb

particle≥0.3µm max

20p/ml

锆（Zr）max

0.1 ppb

particle≥0.5µm max

10p/ml

镓（Ga）max

0.4 ppb

particle≥1.0µm max

3p/ml

汞（Hg）max

0.3 ppb

Chromacity max

10APHA

钾（ K）max

0.2 ppb

Main content（）min

99.99

锂（Li）max

0.1 ppb

Appearance

Colorless transparent liquid

镁（Mg）max

0.5 ppb

Shelf life

24 months